ORMOCER^® for optical applications

The available structuring methods, excellent adhesion to different materials and controllable optical properties make ORMOCER^® lacquers ideal coatings for the production of optical microsystems.

Their compatibility with traditional thin-film technology, simple means of processing (curing temperatures < 170 °C in standard atmosphere) and the possibility of creating microstructures (e.g. bumps or vias) are a guarantee for maximum flexibility and versatility, which is underlined by the fact that ORMOCER^® coatings feature negative resist behavior.

Methods for creating microstructures:

• Standard photolithography process
• Laser ablation
• Laser direct writing
• (Precision-) Stamping

These advantages are completed by the excellent optical properties of (unfluorinated) ORMOCER^® coatings and their dimensional stability.

Refractive index nD:: von ca. 1,45 bis 1,58
Young's modulus: 2.5 GPa (adjustable)
Soldering stability: 300 °C / < 30 min
Thermally stable: bis 300 °C (TG/MS, 5 % Masseverlust)